Heating & Cooling Stage MHCS302
MHCS302Features:
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- Wide temperature range;
- Programmable temperature controller;
- High precision and high resolution temperature measurement and control;
- Software or Manual control Horizontal and vertical mounting;
- Open access to the sample (without cover);
- Multi vacuum zones for different wafer sizes.
MHCS302 Technical Specification
| Temperature Range | Configured from the room to 300°C (400 °C available) |
| Temperature Resolution | 0.1°C with MTDC600 Temperature Controller |
| Temperature Stability | ±0.1°C at 100 °C with MTDC600 Temperature Controller |
| Temperature Control Method | Switching PID |
| Min/Max Heating rate | Min 0.1°C/Max 100°C. |
| Temperature Control Sensor | RTD |
| Sample Area | 50mmx50mm |
System Configuration
